Patent Assignment
Reel/Frame 054601/0186
Assignment of Assignor's Interest
Recorded: 2020-12-10
Pages: 8
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Single Cell Grey Scatterometry Overlay Targets and Their Measurement Using Varying Illumination Parameter(s)