Patent Assignment
Reel/Frame 054610/0436
Assignment of Assignor's Interest
Recorded: 2020-12-10
Pages: 10
Assignors
SUN, JUNLING
Executed: 2020-12-09
LUTKER-LEE, KATIE
Executed: 2020-12-09
RALEY, ANGELIQUE
Executed: 2020-12-09
METZ, ANDREW
Executed: 2020-12-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Forming Contact Holes with Controlled Local Critical Dimension Uniformity