Assignment of Assignor's Interest

Recorded: 2020-12-14 Pages: 5

Assignors

SAHAY, JEYTA ANAND

Executed: 2020-03-20

CHANG, HUA

Executed: 2020-03-26

ZHANG, QI

Executed: 2020-04-07

Assignee

MATTSON TECHNOLOGY, INC.

47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538

Covered Property (1)

Systems and Methods for Removal of Hardmask

Application: 17/120,382 →

Publication: US 2021/0202231

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.