Patent Assignment
Reel/Frame 054635/0354
Assignment of Assignor's Interest
Recorded: 2020-12-14
Pages: 4
Assignors
WANG, YU SHIH
Executed: 2018-04-09
MAO, SHIAN WEI
Executed: 2018-04-09
YEH, MING-HSI
Executed: 2018-04-09
HUANG, KUO-BIN
Executed: 2018-04-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Wet Cleaning with Tunable Metal Recess for Via Plugs