Patent Assignment
Reel/Frame 054661/0575
Assignment of Assignor's Interest
Recorded: 2020-12-16
Pages: 5
Assignors
KOSHIMIZU, CHISHIO
Executed: 2020-12-09
TAMAMUSHI, GEN
Executed: 2020-12-09
INOUE, MASAHIRO
Executed: 2020-12-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method