Patent Assignment
Reel/Frame 054668/0446
Assignment of Assignor's Interest
Recorded: 2020-12-16
Pages: 6
Assignors
ARAKANE, TOSHIYUKI
Executed: 2020-12-08
TSUNAMOTO, TETSU
Executed: 2020-12-10
SATO, MASANORI
Executed: 2020-12-09
OSAKI, YOSHINORI
Executed: 2020-12-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Control Method and Plasma Processing Apparatus