Patent Assignment
Reel/Frame 054703/0516
Assignment of Assignor's Interest
Recorded: 2020-12-20
Pages: 4
Assignors
KIM, TAE SHIN
Executed: 2020-11-30
CHUNG, YOUNG DAE
Executed: 2020-11-30
JEONG, JI HOON
Executed: 2020-11-30
LEE, JEE YOUNG
Executed: 2020-11-30
KIM, WON GEUN
Executed: 2020-11-30
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Heating Unit, Substrate Processing Apparatus, and Substrate Processing Method