Patent Assignment
Reel/Frame 054705/0969
Assignment of Assignor's Interest
Recorded: 2020-12-21
Pages: 3
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Post Etch Defluorination Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.