Patent Assignment
Reel/Frame 056132/0220
Assignment of Assignor's Interest
Recorded: 2021-05-04
Pages: 6
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2021-02-19
Assignees
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEJING, 100176, CHINA
Covered Property
(1)
Post Etch Defluorination Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.