Patent Assignment
Reel/Frame 054709/0860
Assignment of Assignor's Interest
Recorded: 2020-12-11
Pages: 4
Assignor
TAGAWA, SEIICHI
Executed: 2020-12-02
Assignee
OSAKA UNIVERSITY
1-1, YAMADAOKA, SUITA-SHI, OSAKA, 565-0871, JAPAN
Covered Property
(1)
Resist Pattern Formation Method