Patent Assignment
Reel/Frame 054732/0887
Assignment of Assignor's Interest
Recorded: 2020-12-22
Pages: 4
Assignors
WAGNER, BERNHARD
Executed: 2020-09-22
LOFINK, FABIAN
Executed: 2020-09-24
KADEN, DIRK
Executed: 2020-09-24
FICHTNER, SIMON
Executed: 2020-09-23
Assignees
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
HANSASTRASSE 27C, MUNICH, 80686, GERMANY
CHRISTIAN-ALBRECHTS-UNIVERSITAET ZU KIEL
CHRISTIAN-ALBRECHTS-PLATZ 4, KIEL, 24118, GERMANY
Covered Property
(1)
Ferroelectric Material, Mems Component Comprising a Ferroelectric Material, Mems Device Comprising a First Mems Component, Method of Producing a Mems Component, and Method of Producing a Cmos-Compatible Mems Component