Patent Assignment
Reel/Frame 054747/0408
Assignment of Assignor's Interest
Recorded: 2020-12-24
Pages: 5
Assignor
SATAKE, DAISUKE
Executed: 2020-12-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Stage and Substrate Processing Apparatus