Patent Assignment
Reel/Frame 054789/0301
Assignment of Assignor's Interest
Recorded: 2021-01-01
Pages: 7
Assignors
BLASENHEIM, BARRY
Executed: 2020-11-06
DI REGOLO, JOSEPH A.
Executed: 2020-11-05
NGUYEN, HUY
Executed: 2020-10-28
ZHANG, YAN
Executed: 2020-09-09
PRESS, ROBERT
Executed: 2020-12-12
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Measurement And Control Of Wafer Tilt For X-Ray Based Metrology