Patent Assignment
Reel/Frame 054803/0063
Assignment of Assignor's Interest
Recorded: 2021-01-04
Pages: 7
Assignors
YOKOYAMA, TOSHIO
Executed: 2020-11-19
HIRAO, TOMONORI
Executed: 2020-11-19
TSUSHIMA, TAKUYA
Executed: 2020-11-19
OHASHI, HIROTAKA
Executed: 2020-11-19
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method