Patent Assignment
Reel/Frame 054828/0245
Assignment of Assignor's Interest
Recorded: 2021-01-06
Pages: 7
Assignors
PAN, YAOLING
Executed: 2020-07-20
TAE, PATRICK JOHN
Executed: 2020-07-10
TEDESCHI, LEONARD
Executed: 2021-01-05
KRAUS, PHILIP ALLAN
Executed: 2021-01-05
WILLWERTH, MICHAEL D.
Executed: 2021-01-05
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Capacitive Sensors and Capacitive Sensing Locations for Plasma Chamber Condition Monitoring