Patent Assignment
Reel/Frame 054844/0077
Assignment of Assignor's Interest
Recorded: 2021-01-07
Pages: 7
Assignors
VOLKOVICH, ROIE
Executed: 2020-07-20
BACHAR, OHAD
Executed: 2020-08-25
GUTMAN, NADAV
Executed: 2020-07-24
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Metrology System and Method for Measuring Diagonal Diffraction-Based Overlay Targets