Patent Assignment
Reel/Frame 054848/0126
Assignment of Assignor's Interest
Recorded: 2021-01-07
Pages: 5
Assignors
PISARENCO, MAXIM
Executed: 2019-01-07
PANDEY, NITESH
Executed: 2019-03-15
POLO, ALESSANDRO
Executed: 2018-12-20
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Scatterometer and Method of Scatterometry Using Acoustic Radiation