Patent Assignment
Reel/Frame 054851/0635
Assignment of Assignor's Interest
Recorded: 2021-01-08
Pages: 4
Assignors
CHEN, HUAN-CHIEH
Executed: 2020-05-22
LIN, JHIH-REN
Executed: 2020-05-28
LIU, TAI-PIN
Executed: 2020-06-24
TSAI, SHYUE-SHIN
Executed: 2020-07-03
KOAI, KEITH KUANG-KUO
Executed: 2020-06-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Shower Head Structure and Plasma Processing Apparatus Using the Same