Patent Assignment
Reel/Frame 054853/0306
Assignment of Assignor's Interest
Recorded: 2021-01-08
Pages: 3
Assignors
JAK, MARTIN JACOBUS JOHAN
Executed: 2016-12-16
BHATTACHARYYA, KAUSTUVE
Executed: 2016-12-16
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method