Patent Assignment
Reel/Frame 054875/0265
Assignment of Assignor's Interest
Recorded: 2021-01-11
Pages: 4
Assignors
BERRY, III, IVAN L.
Executed: 2019-07-09
LILL, THORSTEN
Executed: 2019-07-09
FISCHER, ANDREAS
Executed: 2019-08-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Electron Excitation Atomic Layer Etch