Patent Assignment
Reel/Frame 054889/0785
Assignment of Assignor's Interest
Recorded: 2021-01-12
Pages: 5
Assignor
HATAKEYAMA, JUN
Executed: 2020-12-15
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process