Patent Assignment
Reel/Frame 054923/0514
Assignment of Assignor's Interest
Recorded: 2021-01-14
Pages: 3
Assignors
YAMAZAKI, RYOJI
Executed: 2021-01-11
MIYASHITA, HIROYUKI
Executed: 2021-01-06
SATO, MIKIO
Executed: 2021-01-06
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Observation System and Plasma Observation Method