Patent Assignment
Reel/Frame 054935/0700
Assignment of Assignor's Interest
Recorded: 2021-01-15
Pages: 4
Assignors
HSIAO, PO-KAI
Executed: 2020-08-27
CHEN, HAN-DE
Executed: 2020-08-27
HUANG, TSAI-YU
Executed: 2020-08-27
CHANG, HUICHENG
Executed: 2020-08-27
YEO, YEE-CHIA
Executed: 2020-08-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Methods for Forming Isolation Regions by Depositing and Oxidizing a Silicon Liner