Patent Assignment
Reel/Frame 054957/0027
Assignment of Assignor's Interest
Recorded: 2021-01-19
Pages: 3
Assignors
PANAGOPOULOS, THEO
Executed: 2019-08-22
FISCHER, ANDREAS
Executed: 2019-09-03
LILL, THORSTEN
Executed: 2019-09-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Thermal Atomic Layer Etch with Rapid Temperature Cycling