Patent Assignment
Reel/Frame 054962/0138
Assignment of Assignor's Interest
Recorded: 2021-01-20
Pages: 14
Assignors
KUBO, AKIHIRO
Executed: 2021-01-15
TAKIGUCHI, YASUSHI
Executed: 2021-01-12
KODAMA, TERUHIKO
Executed: 2021-01-06
OKAMOTO, YOSHIKI
Executed: 2021-01-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Cleaning Apparatus and Substrate Cleaning Method