Patent Assignment
Reel/Frame 054971/0261
Assignment of Assignor's Interest
Recorded: 2021-01-20
Pages: 9
Assignors
NAKIBOGLU, GUNES
Executed: 2015-12-12
BALTIS, COEN HUBERTUS MATHEUS
Executed: 2015-12-16
TROMP, SIEGFRIED ALEXANDER
Executed: 2016-01-05
VAN DE VIJVER, YURI JOHANNES GABRIEL
Executed: 2015-12-18
SCHOLTEN, BERT DIRK
Executed: 2016-01-05
VAN SOMMEREN, DAAN DANIEL JOHANNES ANTONIUS
Executed: 2015-12-17
FRENCKEN, MARK JOHANNES HERMANUS
Executed: 2016-01-11
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Substrate Holder, a Lithographic Apparatus and Method of Manufacturing Devices