Patent Assignment
Reel/Frame 054976/0648
Assignment of Assignor's Interest
Recorded: 2021-01-21
Pages: 3
Assignors
WANG, JIA
Executed: 2018-05-28
KLINKHAMER, JACOB FREDRIK FRISO
Executed: 2018-05-31
LI, HUA
Executed: 2018-05-28
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Bandwidth Calculation System and Method for Determining a Desired Wavelength Bandwidth for a Measurement Beam in a Mark Detection System