Patent Assignment
Reel/Frame 055003/0134
Assignment of Assignor's Interest
Recorded: 2021-01-22
Pages: 8
Assignors
MORITA, SHINYA
Executed: 2020-12-23
NAKADA, TORU
Executed: 2020-12-22
KIMURA, HIROYUKI
Executed: 2021-01-06
SEGAWA, TORU
Executed: 2021-01-06
Assignees
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
SHIN-ETSU QUARTZ PRODUCTS CO., LTD
22-2, NISHISHINJUKU 1-CHOME, SHINJUKU-KU, TOKYO, 160-0023, JAPAN
Covered Property
(1)
Method of Cleaning Reaction Tube, Method of Manufacturing Semiconductor Device, and Substrate Processing Apparatus