Patent Assignment
Reel/Frame 055015/0838
Assignment of Assignor's Interest
Recorded: 2021-01-25
Pages: 7
Assignors
PLIHAL, MARTIN
Executed: 2020-10-20
UPPALURI, PRASANTI
Executed: 2020-11-06
PARAMASIVAM, SARAVANAN
Executed: 2020-07-27
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method for Process Monitoring with Optical Inspections