Patent Assignment
Reel/Frame 055023/0567
Assignment of Assignor's Interest
Recorded: 2021-01-25
Pages: 3
Assignor
LEE, YUNG-YAO
Executed: 2021-01-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Immersion Exposure Tool