Patent Assignment
Reel/Frame 055042/0839
Assignment of Assignor's Interest
Recorded: 2021-01-27
Pages: 5
Assignors
CHEN, BO-CHEN
Executed: 2021-01-10
WU, SHENG-WEI
Executed: 2021-01-22
TSAI, YUNG-LI
Executed: 2021-01-22
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Monitoring of Process Chamber