Patent Assignment
Reel/Frame 055043/0018
Assignment of Assignor's Interest
Recorded: 2021-01-27
Pages: 3
Assignors
FAN, CHI-HSIANG
Executed: 2018-07-31
CHEN, FENG
Executed: 2018-07-30
ZHAO, WANGSHI
Executed: 2018-07-30
ZHANG, YOUPING
Executed: 2018-07-30
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method for Determining an Etch Profile of a Layer of a Wafer for a Simulation System