Patent Assignment
Reel/Frame 055045/0524
Assignment of Assignor's Interest
Recorded: 2021-01-27
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Underlayer and Method of Manufacturing a Semiconductor Device