Patent Assignment
Reel/Frame 055062/0986
Assignment of Assignor's Interest
Recorded: 2021-01-28
Pages: 5
Assignors
TOMURA, MAJU
Executed: 2021-01-26
NIIZEKI, TOMOHIKO
Executed: 2021-01-26
KATSUNUMA, TAKAYUKI
Executed: 2021-01-26
SASAGAWA, HIRONARI
Executed: 2021-01-26
NAKANE, YUTA
Executed: 2021-01-26
ISHIKAWA, SHINYA
Executed: 2021-01-26
ONO, KENTA
Executed: 2021-01-26
KUMAKURA, SHO
Executed: 2021-01-27
TAKINO, YUSUKE
Executed: 2021-01-26
HONDA, MASANOBU
Executed: 2021-01-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method, Substrate Processing Apparatus, and Substrate Processing System