Patent Assignment
Reel/Frame 055077/0864
Assignment of Assignor's Interest
Recorded: 2021-01-29
Pages: 3
Assignee
NIKON CORPORATION
15-3, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Method and Device for Manufacturing Stacked Substrate