Patent Assignment
Reel/Frame 055083/0337
Assignment of Assignor's Interest
Recorded: 2021-01-29
Pages: 8
Assignors
HAN, YUN
Executed: 2021-01-27
VENTZEK, PETER
Executed: 2021-01-27
RANJAN, ALOK
Executed: 2021-01-28
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cyclic Plasma Etch Process