Patent Assignment
Reel/Frame 055085/0786
Assignment of Assignor's Interest
Recorded: 2021-01-29
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Etching Oxide Semiconductor Film and Plasma Processing Apparatus