Patent Assignment
Reel/Frame 055094/0988
Assignment of Assignor's Interest
Recorded: 2021-02-01
Pages: 12
Assignors
ZOPE, BHUSHAN
Executed: 2018-09-04
SHRESTHA, KIRAN
Executed: 2018-08-21
SWAMINATHAN, SHANKAR
Executed: 2018-09-06
ZHU, CHIYU
Executed: 2020-10-21
JUSSILA, HENRI TUOMAS ANTERO
Executed: 2018-08-22
XIE, QI
Executed: 2018-08-21
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Methods for Depositing a Molybdenum Metal Film Over a Dielectric Surface of a Substrate by a Cyclical Deposition Process and Related Semiconductor Device Structures