Patent Assignment
Reel/Frame 055176/0677
Assignment of Assignor's Interest
Recorded: 2021-02-08
Pages: 3
Assignors
LIU, MING CHYI
Executed: 2021-01-27
CHANG, YU-HSING
Executed: 2021-02-08
LIU, SHIH-CHANG
Executed: 2021-01-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
NO. 8, LI-HSIN 6 ROAD, HSINCHU SCIENCE PARK, HSINCHU, ROC 30077, TAIWAN
Covered Property
(1)
Deep Trench Capacitor Including Self-Aligned Plate Contact via Structures and Methods of Forming the Same