Patent Assignment
Reel/Frame 055212/0213
Assignment of Assignor's Interest
Recorded: 2021-02-10
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cathode Unit and Film Forming Apparatus