Patent Assignment
Reel/Frame 055218/0452
Assignment of Assignor's Interest
Recorded: 2021-02-10
Pages: 3
Assignors
KOSHIMIZU, CHISHIO
Executed: 2019-12-17
DOKAN, TAKASHI
Executed: 2019-12-17
KUBOTA, SHINJI
Executed: 2019-12-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Impedance Matching Method, and Plasma Processing Method