Patent Assignment
Reel/Frame 055245/0058
Assignment of Assignor's Interest
Recorded: 2021-02-12
Pages: 7
Assignors
LEE, MYUNGJUN
Executed: 2021-01-04
YOON, CHANGHYEONG
Executed: 2021-01-04
KIM, WOOKRAE
Executed: 2021-01-04
JUNG, JAEHWANG
Executed: 2021-01-04
KIM, JINSEOB
Executed: 2021-01-05
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Metrology Apparatus and Method Based on Diffraction Using Oblique Illumination and Method of Manufacturing Semiconductor Device Using the Metrology Method