Patent Assignment
Reel/Frame 055321/0542
Assignment of Assignor's Interest
Recorded: 2021-02-18
Pages: 3
Assignor
KOSHIMIZU, CHISHIO
Executed: 2021-02-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cleaning Method and Plasma Processing Apparatus