Patent Assignment
Reel/Frame 055321/0804
Assignment of Assignor's Interest
Recorded: 2021-02-18
Pages: 7
Assignors
HSIAO, CHIH-MIN
Executed: 2019-11-18
LAI, CHIH-MING
Executed: 2021-01-27
LAI, CHIEN-WEN
Executed: 2019-11-18
CHANG, YA HUI
Executed: 2019-11-18
LIU, RU-GUN
Executed: 2019-12-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Landing Metal Etch Process for Improved Overlay Control