Patent Assignment
Reel/Frame 055394/0387
Assignment of Assignor's Interest
Recorded: 2021-02-24
Pages: 12
Assignors
SHINADA, MASATO
Executed: 2021-02-19
TAKEYAMA, TAMAKI
Executed: 2021-02-19
ONO, KAZUNAGA
Executed: 2021-02-19
SUZUKI, NAOYUKI
Executed: 2021-02-24
CHIHAYA, HIROAKI
Executed: 2021-02-19
ABARRA, EINSTEIN NOEL
Executed: 2021-02-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Thickness Measuring Apparatus and Film Thickness Measuring Method, and Film Forming System and Film Forming Method