Patent Assignment
Reel/Frame 055417/0084
Assignment of Assignor's Interest
Recorded: 2021-02-25
Pages: 9
Assignors
LEE, DAEHYUN
Executed: 2020-12-29
KANG, YOUNGIL
Executed: 2020-12-28
KIM, YOUNGEUN
Executed: 2020-12-23
KIM, JAESUK
Executed: 2020-12-29
PARK, MINJI
Executed: 2020-12-23
PARK, SANGWOOK
Executed: 2020-12-29
SHIN, DONGHO
Executed: 2020-12-23
YEO, DONGYUN
Executed: 2020-12-29
LEE, CHUNGHUN
Executed: 2020-12-23
CHOI, KYOUNG-MI
Executed: 2020-12-29
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Processing Apparatus and Semiconductor Fabrication Method Using the Same