Patent Assignment
Reel/Frame 055445/0349
Assignment of Assignor's Interest
Recorded: 2021-03-01
Pages: 3
Assignors
BROCKMEIER, ANDRE
Executed: 2021-02-17
HELBIG, STEPHAN
Executed: 2021-02-18
KOLLER, ADOLF
Executed: 2021-02-18
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-15, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
Method with Stealth Dicing Process for Fabricating Mems Semiconductor Chips