Patent Assignment
Reel/Frame 055455/0895
Assignment of Assignor's Interest
Recorded: 2021-03-02
Pages: 4
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Assembly for Characterizing a Mask or a Wafer for Microlithography