Patent Assignment
Reel/Frame 055460/0292
Assignment of Assignor's Interest
Recorded: 2021-03-02
Pages: 2
Assignor
TAMAMUSHI, GEN
Executed: 2021-02-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Holding Method of Edge Ring, Plasma Processing Apparatus, and Substrate Processing System