Patent Assignment
Reel/Frame 055461/0165
Assignment of Assignor's Interest
Recorded: 2021-03-02
Pages: 6
Assignors
MATSUDA, RISAKO
Executed: 2021-02-22
KINOSHITA, SHINOBU
Executed: 2021-02-24
OIE, MANABU
Executed: 2021-02-25
SHOUJI, KEITA
Executed: 2021-02-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing System